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Influence of annealing duration on optical property and surface morphology of ZnO thin film grown by atomic layer deposition

Materials ScienceOptical MaterialsEngineeringOxide ElectronicsSurface ScienceApplied PhysicsZno Thin FilmThin FilmsPulsed Laser DepositionSurface MorphologyChemical Vapor DepositionAtomic Layer DepositionThin Film Processing