Current Applied Physics · 2009 · 24 citations · 24 references
Natural SciencesMaterials EngineeringMaterials ScienceOptical MaterialsSurface ScienceThin FilmsAtomic Layer DepositionSemiconductor SurfacesThin Film AnnealingThin Film Optical PropertiesThin Film Surface MorphologyThin-film MaterialsAnnealing Temperature EffectsAnnealing Time EffectsAtomic Layer Deposition PrecursorsSemiconductor Oxide Thin FilmsThin Oxide FilmsThin Oxide LayersThin-film Growth KineticsThin-film Growth Mechanisms
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