Investigation of Mn-implanted n-Si by low-energy ion beam deposition - Concepedia

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Investigation of Mn-implanted n-Si by low-energy ion beam deposition

DOI Full Paper Access

20

Citations

15

References

2004

Year

Lifeng Liu, Nuofu Chen, Shulin Song, Zhigang Yin, Fei Yang, Chunlin Chai, Shaoyan Yang, Zhikai Liu

Journal of Crystal Growth

Ion ImplantationElectrical EngineeringEngineeringMicrofabricationApplied PhysicsSemiconductor Device FabricationSilicon On Insulator

References

	Year	Citations

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