Publication | Open Access
Fabrication of nano structures in thin membranes with focused ion beam technology
17
Citations
8
References
2009
Year
Materials ScienceMembrane StructureNano StructuresMembrane FormationEngineeringMicrofabricationNanotechnologyNanomaterialsApplied PhysicsThin MembranesCeramic MembraneNanostructuringIon BeamNanofabrication
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