Concepedia

Publication | Closed Access

Optimization of the channel doping profile of vertical sub-100 nm MOSFETs

DOI

15

Citations

7

References

1998

Year

F Kaesen, C Fink, K.G. Anil, W. Hänsch, Theodor Doll, T. Grabolla, Horst Schreiber, I. Eisele
Thin Solid Films

References

YearCitations

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