A thin-film capacitance humidity sensor

Metallization Corrosion in Silicon Devices by Moisture-Induced Electrolysis

H. Koelmans · Reliability physics · 1974 · 50 citations

Natural Sciences, Materials Engineering, Materials Science +16

Solid-state humidity sensors

P.P.L. Regtien · Sensors and Actuators · 1981 · 44 citations

A New Moisture Sensor for "In-Situ" Monitoring of Sealed Packages

Michael G. Kovac, D. Chleck, Philip Goodman · Reliability physics · 1977 · 40 citations

Engineering, Environmental Engineering, Environmental Monitoring +11

Pressure-humidity apparatus

Arnold Wexler, Raymond D. Daniels · Journal of research of the National Bureau of Standards · 1952 · 23 citations · Full text

Natural Sciences, Physiology, Air Conditioning +11

Metallization corrosion in silicon devices by moisture-induced electrolysis

Microelectronics Reliability · 1975 · 14 citations

Natural Sciences, Materials Engineering, Materials Science +16