Publication | Closed Access
Microfabrication of cesium vapor cells with buffer gas for MEMS atomic clocks
119
Citations
29
References
2011
Year
EngineeringPhysicsMicrofabricationBuffer GasApplied PhysicsCesium Vapor CellsMicroscale SystemVacuum DeviceMicro-electromechanical SystemChemical Vapor DepositionMicrofluidicsMems Atomic ClocksMicrostructureMicroelectronics
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