Microstructure of reactively sputtered oxide diffusion barriers - Concepedia

Concepedia

Publication | Closed Access

Microstructure of reactively sputtered oxide diffusion barriers

25

Citations

15

References

1988

Year

E. Kolawa, C. W. Nieh, F. C. T. So, M.−A. Nicolet

Journal of Electronic Materials

Materials ScienceMaterials EngineeringMaterial AnalysisEngineeringDiffusion ResistanceOxide ElectronicsSurface ScienceApplied PhysicsOxide Diffusion Barriers

References

	Year	Citations

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