System identification of a dual-stage XY precision positioning table - Concepedia

Concepedia

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System identification of a dual-stage XY precision positioning table

61

Citations

14

References

2008

Year

Rong‐Fong Fung, Yi-Lung Hsu, Ming‐Shyan Huang

Precision Engineering

Sensor CalibrationEngineeringMeasurementCalibrationPositioning SystemMechatronicsComputer EngineeringEducationSystems EngineeringDynamic PositioningInstrumentationSystem IdentificationLocalization

References

	Year	Citations

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