Development of various designs of low-power, MEMS valves for fluidic applications - Concepedia

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Development of various designs of low-power, MEMS valves for fluidic applications

25

Citations

31

References

2006

Year

Andres M. Cardenas‐Valencia, Jay Dlutowski, John Bumgarner, Christel M. Munoz, W. Wang, R. Popuri, L. Langebrake

Sensors and Actuators A Physical

Electrical EngineeringEngineeringMicromachinesVarious DesignsMicrofabricationMechanical EngineeringPneumaticsMicroelectromechanical SystemsFluid PowerFluidic ApplicationsMicro-electromechanical System

References

	Year	Citations

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