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Correlation between the electrical properties and the interfacial microstructures of TiAl-based ohmic contacts to p-type 4H-SiC

Materials ScienceMaterials EngineeringElectrical EngineeringEngineeringNanoelectronicsApplied PhysicsSemiconductor MaterialSemiconductor Device FabricationInterfacial MicrostructuresMicroelectronicsElectrical PropertiesTial-based Ohmic ContactsCarbideSemiconductor Device