Publication | Closed Access
Thermal simulation of the Czochralski silicon growth process by three different models and comparison with experimental results
76
Citations
10
References
1997
Year
Materials ScienceMaterials EngineeringExperimental ResultsEngineeringPhysicsDifferent ModelsCrystal Growth TechnologyApplied PhysicsThermal SimulationThermodynamicsHeat TransferSilicon On InsulatorMicroelectronicsThermal Engineering
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