Publication | Closed Access
A new positive electron-beam resist material composed of catechol derivatives
11
Citations
6
References
2002
Year
Materials EngineeringMaterials ScienceCatechol DerivativesEngineeringSpecific ResistanceResistorNanoelectronicsElectron-beam LithographyApplied PhysicsMicroelectronicsElectrical PropertyElectron OpticElectrical Insulation
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