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Room Temperature Impact Consolidation (RTIC) of Fine Ceramic Powder by Aerosol Deposition Method and Applications to Microdevices

Materials ScienceAerosol Deposition MethodEngineeringMicrofabricationCeramic MaterialMechanical EngineeringFine Ceramic PowderCeramic SynthesisPowder CompactionCeramic PowdersCeramic TechnologyMicrostructure