Applied Physics A · 2004 · 110 citations · 18 references
Natural SciencesMaterials EngineeringMaterials ScienceThin FilmsPorosity CharacterizationSurface PhysicsThin-film DepositionThin-film MaterialsPorosityPorosity FormationPorosity ReductionThin Film Deposition MaterialsThin-film Growth Mechanisms
18
John A. Thornton · Annual Review of Materials Science · 1977 · 2.1K citations
Natural Sciences, Materials Engineering, Materials Science +12
Advanced techniques for glancing angle deposition
Kevin Robbie, Jeremy C. Sit, Michael J. Brett · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 508 citations
Natural Sciences, Materials Engineering, Materials Science +16
Oblique evaporation and surface diffusion
Léon Abelmann, Cock Lodder · Thin Solid Films · 1997 · 328 citations