Preparation of SixCyHz films from methylsilane by plasma-enhanced chemical vapor deposition

Vibrational spectrum of hydrogenated amorphous SiC films

H. Wieder, M. Cardona, C. R. Guarnieri · physica status solidi (b) · 1979 · 413 citations

Natural Sciences, Materials Engineering, Materials Science +17

Chemical vapor deposition and characterization of 6H-SiC thin films on off-axis 6H-SiC substrates

Hoyoul Kong, Jeffrey T. Glass, R. F. Davis · Journal of Applied Physics · 1988 · 216 citations

Engineering, Materials Engineering, Materials Science +17

Preparation of highly photosensitive hydrogenated amorphous Si-C alloys from a glow-discharge plasma

Akihisa Matsuda, Tomonori Yamaoka, Stefan Wolff et al. · Journal of Applied Physics · 1986 · 134 citations

Natural Sciences, Materials Engineering, Materials Science +17

Reactive plasma deposited SixCyHz films

Y. Catherine, G. Turban · Thin Solid Films · 1979 · 119 citations

Natural Sciences, Materials Science, Physics +10

Microvoids in amorphous Si1−<i>x</i>C<i>x</i>:H alloys studied by small-angle x-ray scattering

D. L. Williamson, A. H. Mahan, B. P. Nelson et al. · Applied Physics Letters · 1989 · 102 citations

Natural Sciences, Materials Engineering, Materials Science +17