A CMOS-based sensor array for in-vitro neural tissue interfacing with 4225 recording sites and 1024 stimulation sites

Abstract

A CMOS-based microelectrode array (MEA) with 4225 recording sites and 1024 stimulation sites and a related data acquisition system are presented. The chip provides high spatiotemporal resolution on an active area of 1 mm × 1 mm or 2 mm × 2 mm, respectively, and allows in-vitro neural tissue interfacing experiments with full imaging capability. The entire chip surface is covered by a thin high-k dielectric layer so that electric coupling between biological tissue and solid-state chip is purely capacitive. Biological experiments reveal proper functionality of the system.