Publication | Closed Access
An investigation of hardness and adhesion of sputter-deposited aluminum on silicon by utilizing a continuous indentation test
149
Citations
6
References
1988
Year
Materials EngineeringMaterials ScienceEngineeringMechanical EngineeringApplied PhysicsContinuous Indentation TestHardnessElectronic PackagingSputter-deposited AluminumMicroelectronicsMechanics Of MaterialsMicrostructureThin Film Processing
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