Superlattices and Microstructures · 2004 · 11 citations · 14 references
EngineeringMaterials SciencePhysicsHeat TransferInstrumentationThermodynamicsHeat ConductionTemperature MeasurementTemperature MetrologyTemperature SensorsThermal SensorsThermal SensingThermal Test Instrumentation
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MEMS flow sensors for nano-fluidic applications
Shuyun Wu, Qiao Lin, Yin Yuen · Sensors and Actuators A Physical · 2001 · 173 citations
A micromachined pressure/flow-sensor
R.E. Oosterbroek, T.S.J. Lammerink, Gijs Krijnen et al. · Sensors and Actuators A Physical · 1999 · 105 citations