Concepedia

Kinetic phenomena in electron transport in radio-frequency fields

Zoran Petrović, Zoran Raspopović, Saša Dujko, Toshiaki Makabe

Applied Surface Science · 2002 · 86 citations · 163 references

DOI

Concepts

References

163

Particle-in-cell charged-particle simulations, plus Monte Carlo collisions with neutral atoms, PIC-MCC

C.K. Birdsall · IEEE Transactions on Plasma Science · 1991 · 1.3K citations

, , +16

Electron Interactions With SF6

L. G. Christophorou, James K. Olthoff · Journal of Physical and Chemical Reference Data · 2000 · 468 citations

, , +13

Energy Distribution of Electrons in High Frequency Gas Discharges

T. Holstein · Physical Review · 1946 · 380 citations

, , +13

Electron Interactions with CF4

Loucas G. Christophorou, James K. Olthoff, M. V. V. S. Rao · Journal of Physical and Chemical Reference Data · 1996 · 362 citations

, , +16

Fluid simulations of glow discharges: Effect of metastable atoms in argon

Dimitris P. Lymberopoulos, Demetre J. Economou · Journal of Applied Physics · 1993 · 361 citations

, , +15