Concepedia

Interaction of SiF3 with silicon surface: Molecular dynamics simulation

Fujun Gou, Quan Xie, Li Zhu, Sun Weili, Xu Ming

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2006 · 11 citations · 12 references

DOI

Concepts

References

12

Surface science aspects of etching reactions

Harold F. Winters, J. W. Coburn · Surface Science Reports · 1992 · 496 citations

, , +12

Chemical and physical sputtering of fluorinated silicon

Maria Elena Barone, David B. Graves · Journal of Applied Physics · 1995 · 100 citations

, , +14

Molecular dynamics simulations of Si etching by energetic CF3+

Cameron F. Abrams, David B. Graves · Journal of Applied Physics · 1999 · 99 citations

, , +17

Plasma–surface interactions

Jane P. Chang, J. W. Coburn · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2003 · 87 citations

, , +16

Effect of polyatomic ion structure on thin-film growth: Experiments and molecular dynamics simulations

Muthu B. J. Wijesundara, Yuan Ji, Boris Ni et al. · Journal of Applied Physics · 2000 · 73 citations

, , +17