Concepedia

Publication | Closed Access

An electroformed CMOS integrated angular rate sensor

DOI

32

Citations

5

References

1998

Year

Shinan Chang, M. Chia, P. Castillo-Borelley, W. Higdon, Q. Jiang, Jack D. Johnson, L. Obedier, Michael W. Putty, Qijia Shi, D. Sparks,
Sensors and Actuators A Physical

References

YearCitations

Page 1