Tuning of electrical and structural properties of indium oxide films grown by metal organic chemical vapor deposition - Concepedia

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Tuning of electrical and structural properties of indium oxide films grown by metal organic chemical vapor deposition

33

Citations

7

References

2007

Year

Ch. Y. Wang, V. Cimalla, H. Romanus, Th. Kups, M. Niebelschütz, O. Ambacher

Thin Solid Films

Materials ScienceElectrical EngineeringStructural PropertiesEngineeringNanoelectronicsOxide ElectronicsSurface ScienceChemical DepositionMicroelectronicsChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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