Concepedia

Publication | Closed Access

Characteristics of thin plasmachemical silicon carbon nitride films deposited using hexamethyldisilane

DOI

17

Citations

21

References

2009

Year

O. K. Porada, L. A. Ivashchenko, I. I. Timofeeva, O. K. Sinelnichenko, Oksana Butenko, L. M. Ushakova
Powder Metallurgy and Metal Ceramics

References

YearCitations

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