Publication | Closed Access
Effect of substrates on morphological evolution of a film in the silicon CVD process: approach by charged cluster model
11
Citations
10
References
2000
Year
Materials ScienceSilicon Cvd ProcessEngineeringCluster ModelSurface ScienceApplied PhysicsSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsMorphological EvolutionChemical Vapor DepositionThin Film Processing
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