Evolution of Atomically Stepped Surface of Indium Tin Oxide Thin Films Grown on Nanoimprinted Glass Substrates

Abstract

Indium tin oxide (ITO) thin films were deposited on atomically stepped glass substrates (step height of ∼0.2 nm and separation of ∼80 nm) by pulsed laser deposition. The atomically stepped glass was prepared via thermal nanoimprint using an atomically stepped sapphire mold. The surface morphology of the ITO thin film definitely reflected the atomically stepped pattern of the glass substrate surface. The step height and the separation of the ITO film surface were close to those of the nanoimprinted glass surface. The fast Fourier transform analysis of the atomic force microscopy image also confirmed the periodicity of the atomic-step pattern.