Publication | Closed Access
Nanoscale patterning with the double-layered soft cylindrical stamps by means of UV-nanoimprint lithography
23
Citations
7
References
2009
Year
Materials ScienceEngineeringBeam LithographyFlexible ElectronicsMicrofabricationFabrication TechniqueApplied PhysicsPattern TransferPrinted ElectronicsUv-nanoimprint LithographyNanolithographyNanofabrication3D PrintingNanolithography Method
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