Concepedia

Mechanism for ion beam passivation of copper surfaces

A.J. Kellock, M.H. Tabacniks, J. E. E. Baglin, N.S. Somcio, Thomas Bardin, Daniel C. Miller

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1997 · 10 citations · 4 references

DOI

Concepts

References

4

Annealing of boron-implanted corrosion resistant copper films

Peng Ding, W. A. Lanford, S. Hymes et al. · Journal of Applied Physics · 1993 · 41 citations

, , +17

Effect of B, C, N, and Ne ion implantation on the oxidation of polycrystalline Cu

H. M. Naguib, R. J. Kriegler, John A. Davies et al. · Journal of Vacuum Science and Technology · 1976 · 38 citations

, , +8

Tribological properties of metals modified by ion-beam assisted deposition of silicone oil

Youichi Itoh, S. Hibi, Tatsumi Hioki et al. · Journal of materials research/Pratt's guide to venture capital sources · 1991 · 32 citations

, , +13

The influence of ion implantation on the thermal oxidation of copper

Peter J. Ratcliffe, R. A. Collins · physica status solidi (a) · 1983 · 15 citations

, , +14