Nanofabrication of a two-dimensional array using laser-focused atomic deposition

Abstract

Fabrication of a two-dimensional array of nanometer-scale chromium features on a silicon substrate by laser-focused atomic deposition is described. Features 13±1 nm high and having a full-width at half maximum of 80±10 nm are fabricated in a square array with lattice constant 212.78 nm, determined by the laser wavelength. The array covers an area of approximately 100 μm×200 μm. Issues associated with laser-focusing of atoms in a two-dimensional standing wave are discussed, and potential applications and improvements of the process are mentioned.