Device grade hydrogenated polymorphous silicon deposited at high rates - Concepedia

Concepedia

Publication | Closed Access

Device grade hydrogenated polymorphous silicon deposited at high rates

18

Citations

13

References

2008

Year

Y.M. Soro, Marie‐Estelle Gueunier‐Farret, Erik Johnson, Christophe Longeaud, P. Roca i Cabarrocas, Jean‐Paul Kleider

Journal of Non-Crystalline Solids

Materials ScienceDevice GradeEngineeringApplied PhysicsSemiconductor Device FabricationHydrogenSilicon On Insulator

References

	Year	Citations

Page 1