Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1990 · 31 citations · 0 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsOptoelectronicsSemiconductor MaterialsIi-vi SemiconductorsIii-v SemiconductorsInfrared Optical MaterialsPhotodetectorsSemiconductor Device MaterialsSurface PassivationElectrical PropertiesFocal Plane ArraysNative Oxide LayersNative Oxide PassivationPassivationPassivation MechanismsPassivation Of SemiconductorsPassivation Techniques
The physical, chemical, and electrical properties of II–VI compounds used for the passivation of HgCdTe are briefly reviewed. Practical passivation technologies for present and next generation infrared focal plane arrays (IRFPAs) are outlined as well as suggested processing methods to improve the current native oxide and sulfide films. Finally, various ways of assessing the quality of the passivating films are discussed.