Low-loss high-silica single-mode channel waveguides

Abstract

Low-loss high-silica single-mode channel optical waveguides of 0.1 dB/cm have been fabricated on crystal silicon substrates with fibre coupling losses of less than 0.05 dB by flame hydrolysis deposition and reactive ion etching. Directional couplers have also been fabricated with excess loss of 0.5 dB by this waveguide fabrication technique.