Fabrication of Multilayers with Growth Controlled by Sequential Surface Chemical Reactions

Abstract

A multilayer of aluminum oxide and titanium oxide was fabricated with growth controlled by sequential surface chemical reactions of trimethylaluminum/hydrogen peroxide for the aluminum oxide layer, and tetrachlorotitanium/hydrogen peroxide for the titanium oxide layer. Evaluation of the multilayer using a transmission electron microscope and an X-ray diffractometer indicated that the 1.6 nm thickness of each layer equaled the design value, and the ratio (Δ2θ/2θ 0 ) of the full width of the first peak to the center angle of the peak was close to the theoretical minimum.