Concepedia

Publication | Closed Access

Scanning acoustic gigahertz microscopy for metrology applications in three-dimensional integration technologies

DOI

34

Citations

5

References

2014

Year

Sebastian Brand, Adriana Lapadatu, Tatjana Djuric, Peter Czurratis, Jan Schischka, Matthias Petzold
Journal of Micro/Nanolithography MEMS and MOEMS

Abstract

Art. 011207, 10 S.

References

YearCitations

Page 1