Sensors and Actuators A Physical · 1997 · 16 citations · 4 references
EngineeringMaterials EngineeringMaterials ScienceMicroelectronicsSemiconductor DevicesSensorsElectrical SensorsMems SensorsMicroelectromechanical SensorsPhotodetectorsSensor MaterialsSilicon MaterialsLow-dimensional SemiconductorsMicrofabricated SensorsSilicon
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Toshiro Futagi, Takahiro Matsumoto, Masakazu Katsuno et al. · Japanese Journal of Applied Physics · 1992 · 61 citations