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Nonlinear electrical transport in porous silicon
193
Citations
12
References
1994
Year
Materials ScienceElectrical EngineeringEngineeringNonlinear Electrical TransportNanoelectronicsSurface ScienceApplied PhysicsP-type SiTransport PhenomenaPorous Si LayersIntrinsic Transport PropertiesPlasma EtchingCharge Carrier TransportMicroelectronicsCharge TransportSilicon On InsulatorElectrical Insulation
We present a study of the electrical transport in porous Si layers prepared by anodic etching of two different kinds of (100) p-type Si substrates. It is shown that by choosing a sufficiently thick layer, the problem of injection from the contacts can be eliminated. In this way we measure the intrinsic transport properties. The results suggest that a Poole-Frenkel type of mechanism accounts for the observed electric-field-enhanced conduction.
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