Physical review. B, Condensed matter · 1994 · 194 citations · 12 references
EngineeringElectrical EngineeringMaterials ScienceSemiconductor DevicesSemiconductor MaterialsTransport PhenomenaCarrier TransportCharge Carrier TransportSemiconductor Device MaterialsSemiconductor PhysicsSilicon MaterialsTransport In Porous MediaCarrier Transport MechanismsElectrical Transport PropertiesEtchingIntrinsic PropertiesNonlinear TransportPorous SiliconSemiconductor ConductivityTransport In Semiconductors
We present a study of the electrical transport in porous Si layers prepared by anodic etching of two different kinds of (100) p-type Si substrates. It is shown that by choosing a sufficiently thick layer, the problem of injection from the contacts can be eliminated. In this way we measure the intrinsic transport properties. The results suggest that a Poole-Frenkel type of mechanism accounts for the observed electric-field-enhanced conduction.
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Porous silicon formation: A quantum wire effect
V. Lehmann, U. Gösele · Applied Physics Letters · 1991 · 1.9K citations
Natural Sciences, Materials Engineering, Materials Science +17