Monte Carlo Simulation of 1 eV–35 keV Electron Scattering in Teflon

Abstract

A simple physical model of ≈1 eV–35 keV electron scattering in insulating polymers was proposed. A new correction to Slater's exchange potential was used for the description of low-energy elastic electron scattering. The simulation of electron trajectories was performed using the Monte Carlo technique. The integral and differential characteristics such as the total secondary electron yield and elastic and backscattering coefficients for Teflon were investigated for ≈1 eV–35 keV electron beams. The charge distribution inside Teflon as a function of the penetration depth was also calculated. The obtained results are in a good agreement with available experimental data.