Ion bombardment effects during deposition of nitride and metal films

Use of ion beam assisted deposition to modify the microstructure and properties of thin films

F.A. Smidt · International Materials Reviews · 1990 · 411 citations

Natural Sciences, Materials Engineering, Materials Science +17

Ion-beam-induced epitaxial vapor-phase growth: A molecular-dynamics study

Karl‐Heinz Müller · Physical review. B, Condensed matter · 1987 · 312 citations

Natural Sciences, Materials Science, Physics +17

Ion beam assisted thin film deposition

J. K. Hirvonen · Materials Science Reports · 1991 · 166 citations

Natural Sciences, Materials Engineering, Materials Science +13

Formation of polyhedral N2 bubbles during reactive sputter deposition of epitaxial TiN(100) films

Lars Hultman, J.‐E. Sundgren, J. E. Greene · Journal of Applied Physics · 1989 · 118 citations

Natural Sciences, Materials Engineering, Materials Science +17

Growth of thin films with preferential crystallographic orientation by ion bombardment during deposition

Wolfgang Ensinger · Surface and Coatings Technology · 1994 · 69 citations

Natural Sciences, Materials Engineering, Materials Science +16