Vacuum · 2010 · 36 citations · 13 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistrySurface ScienceThin FilmsAluminum OxidesThin Film Electrical PropertiesThin-film DepositionThin-film MaterialsLayer Thickness EffectsMagnetron SputteringSputter DepositionSputteringThin Oxide FilmsThin Oxide LayersThin-film Growth Mechanisms
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Comparative material study on RF and DC magnetron sputtered ZnO:Al films
O. Kluth, G. Schöpe, B. Rech et al. · Thin Solid Films · 2005 · 122 citations
Natural Sciences, Materials Engineering, Materials Science +16