Fabrication of a miniature-size pyramidal-shape diamond field emitter array

Abstract

A miniature-size pyramidal-shape diamond field emitter array has been fabricated using the mold technique. The tip radius of each pyramid was found to be less than 2000 /spl Aring/ from SEM observation and the fabricated array was identified as diamond from the results of AES and Raman spectroscopy. The array was placed in a high vacuum pumping system with the basic pressure of 10/sup -7/ Torr, and the emission property was measured using a Au ball anode with 100 μm in diameter. The distance between the anode and the array was set up to 100 μm throughout the measurements. As a result, the emission current of 1×10/sup -6/ A was observed at the applied voltage of 2400 V.