Sensors and Actuators B Chemical · 2006 · 26 citations · 21 references
EngineeringElectrical EngineeringMaterials ScienceMicroelectromechanical SystemsMicrofabricationPolymer EngineeringMems FabricationMicrofabrication ProcessesMicrofluidic DevicesMicrofluidic SystemsMicrofluidicsPolymer Thin FilmsFabricationMicroelectromechanical System FabricationMicrofluidic Channel FabricationMicrofluidic Chip DesignMicrofluidic Device DesignMicrofluidic FabricationMultilayer Polymer FilmsPolymers In Mems Fabrication
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