Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1991 · 15 citations · 0 references
Natural SciencesMaterials EngineeringMaterials ScienceCrystal StructureSemiconductor MaterialsThin FilmsAlloysCrystal GrowthEpitaxial GrowthSemiconductor Crystal GrowthThin-film MaterialsX-ray DiffractionAlloy SemiconductorsExcimer LasersLaser AblationPolycrystalline Semiconductor FilmsPolycrystalline Thin FilmsRaman ScatteringTemperature-dependent GrowthVibrational Mode Analysis
An XeCl excimer laser was used to grow thin polycrystalline films of the ternary alloy semiconductor, ZnSexTe1−x, on sodium-free glass substrates. The laser ablation/evaporation process has produced films spanning the entire compositional range with x values close to those of the original target. At a typical growth temperature of 300 °C, the grains possess orientations which vary from a predominant 〈111〉 for ZnTe to 〈311〉 for ZnSe with an increasing fraction of 〈311〉 as the ZnSe fraction increases. X-ray diffraction shows that the alloy lattice constant increases linearly with the x value, absorption measurements show band bowing similar to that observed in bulk single crystals, and Raman studies show that the lattice dynamics are characteristic of single-vibrational-mode behavior over the entire alloy range.