Smart Materials and Structures · 1998 · 26 citations · 5 references
EngineeringMechanical EngineeringMechatronics EngineeringActuatorsMicroelectromechanical SystemsMicrofabricationContact MechanicsMachiningSliding ContactSurface MicromachiningAcoustic ActuatorsContact Area OptimizationMaximum OutputMicro-contact MechanicsSurface Micromachined Actuators
Abstract. Previously, the surface acoustic wave linear motor has been demonstrated and its exact pre-load conditions investigated. Based on this previous research, multi-contact-point sliders were designed and tested. A maximum output force of 0.45 N, 450 times that obtained in preliminary experiments, was successfully obtained. Simple simulation results predicted that much larger thrust would be available by increasing the actual contact point area without changing the slider and the stator dimensions. The calculated output force was 10 N, roughly twenty times that observed experimentally. To realize the required stator texture of the contact surface, a silicon micro-machining technique or other conventional methods would be applicable. 1.
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Evaluation of a surface acoustic wave motor output force
Makoto Chiba, Masakazu Takahashi, Minoru Kurosawa et al. · 2002 · 10 citations
Engineering, Mechanical Engineering, Mechatronics Engineering +7