Electrical Properties and Structural Defects in Epitaxial CaF₂ on Si

Epitaxial growth and characterization of CaF2 on Si

L. J. Schowalter, R. W. Fathauer, Raymond P. Goehner et al. · Journal of Applied Physics · 1985 · 150 citations

Materials Science, Materials Engineering, Ionic Fluorite Crystal +14

Strain measurement of epitaxial CaF2 on Si (111) by MeV ion channeling

Shin Hashimoto, W. M. Gibson, L. J. Schowalter et al. · Applied Physics Letters · 1985 · 109 citations

Caf2 Films, Engineering, Thin Film Process Technology +16

Molecular beam epitaxy growth and applications of epitaxial fluoride films

L. J. Schowalter, R. W. Fathauer · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 108 citations

Engineering, Crystal Growth Technology, Caf2 Surface +16

Surface morphology of epitaxial CaF2 films on Si substrates

R. W. Fathauer, L. J. Schowalter · Applied Physics Letters · 1984 · 94 citations

Materials Science, Surface Characterization, Engineering +13

The effects of nucleation and growth on epitaxy in the CoSi2/Si system

J. M. Gibson, J. C. Bean, J. M. Poate et al. · Thin Solid Films · 1982 · 64 citations

Engineering, Physics, Applied Physics +5