Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 18 citations · 0 references
EngineeringManufacturing EngineeringMaterials EngineeringManufacturing ProcessesMaterials ProcessingMicrofabricationLaser CuttingLaser Material ProcessingLaser Surface ProcessingMachiningCleaning ProcessesCracksLaser Beam MachiningLaser HeatingLaser Shock ProcessingSurface CoolingSurface Cooling EffectsThermal Shock
In FPD (Flat Panel Display) devices, the diamond wheel has been used to scribe glass by means of mechanical contact which needs grinding and cleaning processes to remove particles, glass chips, surface cracks and sharp edges. In recent years, laser glass technology that is different from the conventional method of cutting glass by melting, has been researched and utilizes cutting glass by thermal shock. Laser glass cutting by thermal shock can produce cracks in glass by surface cooling after laser heating on glass by means of stress slope on glass surface. When this technology is applied in FPD manufacturing devices, it has several advantages compared to conventional methods as follows: a) non-contact glass cutting: almost no glass chip occurs. b) according to circumstances, grinding and cleaning can be omitted. c) system maintenance can be simplified.