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Ablation characteristics of aluminum oxide and nitride ceramics during femtosecond laser micromachining

Materials ScienceAdvanced Laser ProcessingEngineeringAluminum OxideLaser Micro-processingMicrofabricationFemtosecond Laser MicromachiningApplied PhysicsLaser AblationLaser MaterialLaser Processing TechnologyLaser-assisted DepositionAblation CharacteristicsMicrostructure