Thin Solid Films · 1968 · 18 citations · 7 references
Natural SciencesMaterials EngineeringMaterials ScienceSemiconductor MaterialsSurface ScienceThin FilmsOxide SemiconductorsSemiconductor Device MaterialsSemiconductor InterfacesSilicon MaterialsThin Film AnnealingThin Film Surface MorphologyAnnealing EffectsAnnealing Temperature EffectsAnnealing Time EffectsSilicon DioxideVacuum Annealing
7
B J Todd · Journal of Applied Physics · 1955 · 105 citations
Natural Sciences, Materials Engineering, Materials Science +14
Vacuum deposition of dielectric films for capacitors
Gillian Siddall · Vacuum · 1959 · 86 citations
Natural Sciences, Materials Engineering, Materials Science +14