Electro-thermal analysis of MEMS microhotplates for the optimization of temperature uniformity

Abstract

This paper presents a microhotplate working up to 1200 °C with improved temperature uniformity by optimizing the geometry of the thin-film resistor. By varying the linewidth of meandering resistive tracks, heat is generated in such a way to have more homogenous temperature distribution. The microhotplates are fabricated using molybdenum as conductive material for the heater. Infrared thermal mapping shows that the temperature variation over the heated area is reduced from an initial 13% to 4%.