Characterization of traps in the gate dielectric of amorphous and nanocrystalline silicon thin-film transistors by 1/f noise

Abstract

The low frequency noise technique is used to obtain the volume profile of traps in the SiNx gate dielectric of hydrogenated amorphous silicon (a-Si:H) and nanocrystalline silicon (nc-Si:H) thin film transistors (TFTs). In both a-Si:H and nc-Si:H TFTs, within the range of probing depth in the gate dielectric, the traps have a uniform spatial distribution which is consistent with the observed pure 1/f noise. The experimental results show that the gate dielectric trap properties near the interface are dependent on the channel material with the trap density in nc-Si:H TFTs being much smaller in comparison with the a-Si:H TFTs.