Acta Physica Polonica A · 2013 · 12 citations · 4 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials CharacterizationMaterials ChemistryThin FilmsMetal Oxide NanomaterialsMetal OxidesOxide SemiconductorsSurface OxidationSurface PhysicsThin Film OxidationAtomic Force Microscopy AnalysisCrystal Surface MorphologyMagnetron SputteringMolybdenum ChemistrySputteringThermal OxidationThin Oxide FilmsThin Oxide Layers
In this study, molybdenum (Mo) thin lms have been deposited on Si substrate by dc magnetron sputtering. Then for preparation of MoO3 thin lms the thermal oxidation of Mo thin lms under the oxygen ow was employed in the electrical furnace. The inuence of the dierent thermal oxidation temperatures at 400, 600, 800 and 1000 C on the structural and morphological properties of MoO3 thin lms were characterized by X-ray diraction and atomic force microscopy, respectively. The results show that the crystallinity and surface morphology of the lms are strongly dependent on the thermal oxidation temperatures.
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Transparent Conducting Oxides for Photovoltaics
Elvira Fortunato, David S. Ginley, Hideo Hosono et al. · MRS Bulletin · 2007 · 901 citations
Natural Sciences, Materials Engineering, Materials Science +12
Characteristics of Li/MoO3âx thin film batteries
H. Ohtsuka · Solid State Ionics · 2001 · 63 citations
Natural Sciences, Materials Engineering, Materials Science +12