Materials Chemistry and Physics · 2001 · 13 citations · 17 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistrySurface ScienceThin FilmsChemical Vapor DepositionEpitaxial GrowthMetal OxidesMetalsThin-film DepositionThin-film MaterialsEpitaxial Film GrowthEpitaxial Thin-film GrowthFilm Growth MechanismsMetal-organic Chemical Vapor DepositionThin Oxide FilmsThin Oxide LayersThin-film Growth Mechanisms
17
Global Model of Plasma Chemistry in a High Density Oxygen Discharge
Chae-Jin Lee, David B. Graves, M. A. Lieberman et al. · Journal of The Electrochemical Society · 1994 · 237 citations
Natural Sciences, Chemistry, Physics +16